2024-05-06T12:02:03+08:002024-05-06|News&Events, Events|

The Distinguished Lecture on “Towards Multi-modal Multi-resonator MEMS Sensors: Exploiting Nonlinear Effects and Modal Interactions within MEMS Resonators” will take place as follows:

Date: 07 May 2024 (Tue)

Time: 10:00 a.m. – 12:00 p.m. 

Venue: Research Building N21, 3/F, Room 3004

The speaker is:

Prof. ZHAO Chun, School of Physics, Engineering and Technology, University of York, UK


The Lecture is:

Towards Multi-modal Multi-resonator MEMS Sensors: Exploiting Nonlinear Effects and Modal Interactions within MEMS Resonators



High-performance resonant MEMS sensors can be a viable route towards exciting new applications, from remote environmental monitoring to wearable healthcare systems. However, a gulf between the state-of-the-art resonant sensors and the market demand exists in terms of sensor resolution. To close this gap for practical applications in these new applications, we need to both reduce the sensor noise and improve sensor stability. In this talk, I will first talk about the work we have done in terms of high-resolution, single-mode, single-resonator MEMS sensors. I will highlight a few achievements as well as potential challenges. We will then dive into a series of work our group have done with the aim to address these challenge. Our proposed solution is a multi-modal and/or multi-resonator MEMS sensor, as opposed to the current mainstream of single-mode and single-resonator operation as mentioned above. More specifically, we will talk about (1) multi-modal MEMS sensors, whereby a novel method of parametric modulation is employed to improve long-term stability; (2) multi-resonator MEMS sensors, e.g. a mode-localized sensor, with a much-improved noise floor and long-term stability; and (3) sensors with a combination of multi-modal and multi-resonator operation, which demonstrates great potential for high-resolution and multi-parameter sensing applications. These methods discussed in this talk will pave the way for realizing next-gen high-resolution MEMS sensors for a range of exciting new applications.



Dr. ZHAO Chun is currently a Lecturer/Assistant Professor in Microengineering at the University of York, UK. He obtained his BEng from Huazhong University of Science and Technology, MSc from Imperial College London, and PhD from the University of Southampton. He then worked at Sharp Laboratories of Europe, University of Cambridge, and Huazhong University of Science and Technology, before joining his current position in 2022. Dr. ZHAO has over 10 years of experience in developing high-performance MEMS sensors and resonators exploiting their nonlinear dynamics. His research has been funded by the Royal Society, EPSRC IAA funding, National Science Foundation of China, and the Ministry of Science and Technology, China. He currently serves as an Associate Editor for IEEE Sensors Journal, and Technical Program Committee Member for IEEE MEMS 2024.


For more details, kindly find the event poster, abstract and bio.