2023-07-20T17:08:04+08:002023-07-20|News&Events, Events|

The Distinguished Lecture on “Parylene: a powerful polymer material in MEMS” will take place as follows:

Date: 24 July 2023 (Monday)

Time: 11:00 am – 12:00 pm 

Venue: Research Building N21, G/F, G013

The speaker is:

Prof. WANG Wei, Deputy dean, School of Integrated Circuits, Peking University


The Lecture is:

Parylene: a powerful polymer material in MEMS



Parylene is a room temperature chemical vapor deposition prepared polymer, that can be further fabricated by various MEMS compatible processes. In this talk, I will introduce Parylene itself along with its basic fabrication approaches. Methods to prepare ultra-thin (down to single molecule) Parylene, Parylene nanograsses and Parylene caulked PDMS will be presented. Meanwhile, applications of Parylene in biomedical engineering, flexible electronics and advanced package will be also discussed.



Prof. Wei Wang is the deputy dean of School of Integrated Circuits, Peking University and the director of the National Key Laboratory of Advanced Micro and Nano Manufacture Technology. He received his B.S. in Thermal engineering from University of Shanghai for Science and Technology (USST, 1999) and the Ph.D. in Thermal Engineering from Tsinghua University (2005). He was a Visiting Professor in UC Davis (with Prof. Tingrui Pan) from 2007-2008 and Caltech (with Prof. YC Tai) from 2014-2015. His research focus is Parylene MEMS, clinical micro/nanosystem, and thermal management of 3D microsystem. He has published over 150 peer-reviewed articles, over 50 presentations with over 15 invited presentations, and 50 patents pending or granted. He is the Associated Editor of Microfluidics and Nanofluidics, Microsystems & Nanoengineering, and has served/ is serving on organizing committees for several international conferences, including IEEE MEMS’2015 and ‘2016, Transducers’2019, and 2021 etc.


For more details, kindly find the event poster, abstract and bio.