The Distinguished Lecture on “Research on MEMS Pressure Sensors at the MNS Group, KU Leuven” will take place as follows:
Date: 28 March 2025 (Friday)
Time: 15:00 – 15:55
Venue: Research Building N21, G013
The speaker is:
Dr. WANG Chen, Post-doctoral Researcher, MNS-ESAT, KU Leuven, Belgium
The Lecture is:
Research on MEMS Pressure Sensors at the MNS Group, KU Leuven
Abstract:
Microelectromechanical systems (MEMS) pressure sensors have been commercially successful since the 1970s, with pressure sensing being one of the first applications of MEMS devices. MEMS pressure sensors can be classified into different types based on their sensing principles, such as resonant, optical, capacitive, and piezoresistive devices. Among these, MEMS piezoresistive pressure sensors have gained significant market share in automotive and consumer applications. The presentation aims to introduce activities by Dr. Chen Wang with Melexis company over the last two years at KU Leuven, Belgium, revolving around MEMS pressure sensor. Several projects will be discussed in details, such as, Nonlinearity Compensation for MEMS Pressure Sensors Using Piezoresistors at the Neutral Position, a Novel MEMS Resonant Pressure Sensor Operating in Air with Thermal Actuation and Piezoresistive Sensing, Temperature Compensation for MEMS Pressure Sensors Through Dual Sensing Outputs, a Rapid Characterization Method for Pressure Sensors with Continuously Ramping Pressure and Temperature.
Biography:
Dr. WANG Chen received his bachelor’s degree from Anhui University in June 2013. In June 2018, he successfully defended his Ph.D. at Zhejiang University, China, and in October 2021, he defended another Ph.D. at the University of Liège, Belgium. The two theses are entirely independent in terms of publications and topics, one in optics and the other in MEMS. His research interests include MEMS design and optimization, MEMS sigma delta modulator closed-loop systems, MEMS pressure sensors, inertial sensors, infrared sensors, and coupled resonators. His research resulted in 40 (14 Optics, 25 MNS) journal paper publications (20 first/last/corresponding author), 51 conference publications (35 first/last/corresponding author), and 8 Chinese patents. He has received several academic awards, including the Research Excellence Award from SPIE in the U.S. (15 out of 3,000) and the Best Presentation Award at the IMEKO 2014 Conference in Japan (2 out of 500), the third place in the “MEMS Design Contest 2018” (organized by Coventor, Cadence, X-FAB), and two best paper finalists at the IEEE MEMS 2022 conference. He serves as a technical program committee member for the 2025 IEEE MEMS Conference, and the 2025 Transducer Conference and the 2022 Eurosensors Conference. He is a guest editor of Sensors journal special issue and reviewer for several journals, including the Journal of Microelectromechanical Systems, IEEE Sensors Journal, Nature Microsystems & Nanoengineering, Nature Communications Engineering and IEEE Transactions on Industrial Electronics. He has delivered invited lectures at the University of Macau, the University of York (UK), Peking University (China), and various institutes within the Chinese Academy of Sciences (SIMIT, IMECAS), Shanghai Industrial Technology Research Institute. Over the past four years, Dr. WANG Chen has secured a total funding budget exceeding 1 million EUR from various funding agencies and industry sources.
For more details, kindly find the event poster, abstract and bio.
